Epitaxial wafer composition:

外延片指的是在衬底上生长出的半导体薄膜,薄膜主要由P型、量子阱、N型三个部分构成。

Epitaxial film refers to a semiconductor thin film grown on a substrate, which is mainly composed of three parts: P-type, quantum well, and N-type.

外延片需要清洗吗：

Do epitaxial wafers need to be cleaned

外延片在测量阻值之前需要进行清洗，常用的清洗工艺步骤包括：清洗、甩干，然后测量。

The epitaxial film needs to be cleaned before measuring the resistance value, and the commonly used cleaning process steps include: cleaning, drying, and then measuring.

外延片属于半导体行业，半导体材料在制备过程中，每一道工序都涉及到清洗，而且清洗的好坏直接影响下一道工序，甚至影响器件的成品率。

Epitaxial wafers belong to the semiconductor industry. During the preparation process of semiconductor materials, each process involves cleaning, and the quality of cleaning directly affects the next process, and even affects the yield of devices.

VGT-1509FH超声波清洗机：

VGT-1509FH Ultrasonic Cleaning Machine:

外延片清洗用到的清洗机配置得有溢流槽与干燥槽。威固特VGT-1509FH超声波清洗机共有15个功能槽，配置有循环过滤系统、浸泡系统、自动恒温系统、溢流系统、抛动系统、超声波清洗系统、慢拉脱水系统、热风烘干系统等。其中清洗部分与慢拉热风干燥部份分别独立电器控制，设备采用环保型有机溶剂洗涤、水溶剂清洗、纯水漂洗、慢拉脱水热风烘干，为环保型清洗机。

The cleaning machine used for cleaning epitaxial wafers is equipped with overflow slots and drying slots. The VGT-1509FH ultrasonic cleaning machine has a total of 15 functional tanks, equipped with a circulating filtration system, soaking system, automatic constant temperature system, overflow system, throwing system, ultrasonic cleaning system, slow pulling dehydration system, hot air drying system, etc. The cleaning part and the slow pulling hot air drying part are independently controlled by electrical appliances. The equipment adopts environmentally friendly organic solvent washing, water solvent washing, pure water rinsing, and slow pulling dehydration hot air drying, making it an environmentally friendly cleaning machine.

超声波清洗是基于空化作用，即在清洗液中无数气泡快速形成并迅速内爆。气泡是在液体中施加高频（超声频率）、高强度的声波而产生的。因此，任何超声清洗系统都必须具备三个基本元件：盛放清洗液的槽、将电能转化为机械能的换能器以及产生高频电信号的超声波发生器。

Ultrasonic cleaning is based on cavitation, where countless bubbles rapidly form and implode in the cleaning solution. Bubbles are generated by applying high-frequency (ultrasonic frequency) and high-strength sound waves in liquids. Therefore, any ultrasonic cleaning system must have three basic components: a tank to hold cleaning fluid, a transducer to convert electrical energy into mechanical energy, and an ultrasonic generator to generate high-frequency electrical signals.

清洗设备的能力为3-8分钟（可调）清洗一篮。

The cleaning equipment has a capacity of 3-8 minutes (adjustable) to clean one basket.

VGT-1509FH超声波清洗机配置：

VGT-1509FH Ultrasonic Cleaning Machine Configuration:

超声水剂清洗槽：

Ultrasonic water cleaning tank:

1、每槽设四面溢流口，溢水槽宽35mm，各槽均为独立循环槽，由循环泵将洗剂由储液箱抽出经过滤后再运回清洗槽，即子目槽循环。

1. Each tank is equipped with four overflow ports, with a width of 35mm. Each tank is an independent circulating tank, and the detergent is extracted from the storage tank by a circulating pump, filtered, and then transported back to the cleaning tank, which is a sub tank for circulation.

2、设置独立循环过滤系统。

2. Set up an independent circulating filtration system.

3、配置第四代超声波发生器，从根本上保证超声波到有效转换率，保证超声波效果并保证超声波发生器质量到稳定性。

3. Configure the fourth generation ultrasonic generator to fundamentally ensure the effective conversion rate from ultrasonic to ultrasonic, ensure the ultrasonic effect, and ensure the quality and stability of the ultrasonic generator.

4、超声波发生器内设单片机，内附特有到定时系统，可根据生产需要任意调整清洗时间并形成一对一的设置，定时更具灵活性，保证清洗到一致性。

4. The ultrasonic generator is equipped with a microcontroller and a unique timing system, which can adjust the cleaning time according to production needs and form a one-on-one setting. The timing is more flexible, ensuring consistency in cleaning.

5、储液箱的设置是由隔板分成两腔，分油后的清洁溶液经循环泵重新抽入清洗槽，实现自我循环，提高溶液到利用率，而分离后到油排放到总排管。

5. The setting of the liquid storage tank is divided into two chambers by a partition, and the cleaning solution after oil separation is re pumped into the cleaning tank through a circulation pump to achieve self circulation and improve the utilization rate of the solution. After separation, the oil is discharged into the main discharge pipe.

超声回用纯水漂洗槽：

Ultrasonic Reuse Pure Water Rinsing Tank:

1、设置独立槽。

1. Set up independent slots.

2、槽底部设排液阀。

2. A drain valve is installed at the bottom of the tank.

3、槽外设置抛动。

3. Set up throwing outside the groove.

4、设有加热系统。

4. Equipped with a heating system.

慢拉脱水槽：

Slow pull off sink:

1、槽体设齿状溢流结构，纯水由纯水预热箱进入。槽外贴保温棉厚10mm。

1. The tank body is equipped with a toothed overflow structure, and pure water enters through the pure water preheating box. Apply insulation cotton with a thickness of 10mm outside the groove.

2、槽体设“OMRON”数显温控系统，检测槽内工作温度，温控范围：常温-120℃。

2. The tank body is equipped with an "OMRON" digital temperature control system to detect the working temperature inside the tank, with a temperature control range of -120 ℃.

3、槽体上部设抽风小孔，将溢出水蒸汽抽走，防止水气再次附着于提出到产品上。

3. The upper part of the tank is equipped with ventilation holes to extract the overflowing water vapor and prevent it from adhering to the product again.

4、在烘干槽顶部加设FFU系统，有效减少环境对洗净效果到影响。（工件加温后，对灰尘的附着力增强，FFU形成负压可有效减少环境对洗净效果到影响，从而根本上提高产品合格率）。

4. Add an FFU system at the top of the drying tank to effectively reduce the impact of the environment on the cleaning effect. After heating the workpiece, the adhesion to dust is enhanced, and the negative pressure formed by FFU can effectively reduce the impact of the environment on the cleaning effect, thereby fundamentally improving the product qualification rate.